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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Development of a compact optical MEMS scanner with integrated VCSEL light source and diffractive optics
Krygowski, Thomas W., Reyes, David, Rodgers, M. Steven, Smith, James H., Warren, Mial E., Sweatt, William C., Blum-Spahn, Olga, Wendt, Joel R., Asbill, Randolph E., Motamedi, M. Edward, Goering, RolfVolume:
3878
Year:
1999
Language:
english
DOI:
10.1117/12.361250
File:
PDF, 2.99 MB
english, 1999