SPIE Proceedings [SPIE Symposium on High-Power Lasers and Applications - San Jose, CA (Saturday 22 January 2000)] Laser Applications in Microelectronic and Optoelectronic Manufacturing V - Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser
Lee, JongMoo, Jang, Jun-Ho, Yoo, Tae-Kyung, Helvajian, Henry, Sugioka, Koji, Gower, Malcolm C., Dubowski, Jan J.Volume:
3933
Year:
2000
Language:
english
DOI:
10.1117/12.387560
File:
PDF, 1.32 MB
english, 2000