SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara,...

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SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Advances in Resist Technology and Processing XVII - Polymers for 157-nm photoresist applications: a progress report

Patterson, Kyle, Yamachika, Mikio, Hung, Raymond J., Brodsky, Colin J., Yamada, Shintaro, Somervell, Mark H., Osborn, Brian, Hall, Daniel S., Dukovic, Gordana, Byers, Jeff D., Conley, Will, Willson, C
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Volume:
3999
Year:
2000
Language:
english
DOI:
10.1117/12.388320
File:
PDF, 1.40 MB
english, 2000
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