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SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Optical Microlithography XIII - Properties and potential of VUV lithographic thin film materials
Cangemi, Michael J., Lassiter, Matthew, Bourov, Anatoly, Smith, Bruce W., Progler, Christopher J.Volume:
4000
Year:
2000
Language:
english
DOI:
10.1117/12.388995
File:
PDF, 547 KB
english, 2000