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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - MEMS/MOEMS for lightwave networks: Can little machines make it big?
Bishop, David J., Aksyuk, Vladimir A., Bolle, Cristian A., Giles, C. Randy, Pardo, Flavio, Walker, James A., Peeters, Eric, Paul, OliverVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395629
File:
PDF, 1.03 MB
english, 2000