SPIE Proceedings [SPIE Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 12 June 2000)] Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Evaluation of carbon surface diffusion on silicon by using surface phase transitions
Scharmann, F., Maslarski, P., Lehmkuhl, D., Stauden, Th., Pezoldt, Joerg, Melker, Alexander I.Volume:
4348
Year:
2001
DOI:
10.1117/12.417645
File:
PDF, 354 KB
2001