SPIE Proceedings [SPIE Micromachining and Microfabrication...

  • Main
  • SPIE Proceedings [SPIE Micromachining...

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - Magnetically actuated microshutter arrays

Mott, David B., Aslam, Shahid, Blumenstock, Kenneth A., Fettig, Rainer K., Franz, David E., Kutyrev, Alexander S., Li, Mary J., Monroy, Carlos J., Moseley, Jr., Samuel H., Schwinger, David S., Motamed
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4561
Year:
2001
Language:
english
DOI:
10.1117/12.443109
File:
PDF, 592 KB
english, 2001
Conversion to is in progress
Conversion to is failed