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SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry
Bosseboeuf, Alain, Nerin, Philippe, Vabre, Pascal, Petitgrand, Sylvain, Yahiaoui, Reda, Gorecki, Christophe, Jueptner, Werner P. O., Kujawinska, MalgorzataVolume:
4400
Year:
2001
Language:
english
DOI:
10.1117/12.445603
File:
PDF, 337 KB
english, 2001