SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Electronics and Structures for MEMS II - Australian national networked tele-test facility for integrated systems
Eshraghian, Kamran, Lachowicz, Stefan W., Eshraghian, Sholeh, Bergmann, Neil W., Abbott, Derek, Hariz, Alex, Varadan, Vijay K.Volume:
4591
Year:
2001
Language:
english
DOI:
10.1117/12.449152
File:
PDF, 249 KB
english, 2001