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SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara,...

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SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Advances in Resist Technology and Processing XX - Effects of quencher ability on profile in chemically amplified resist system

Kim, Deogbae, Kim, Hyun-Jin, Cho, Sook-Hee, Lee, Dong-Hwal, Im, Kwang-Hyi, Yoo, Min-Ja, Lee, Sang-Hyang, Kim, Jaehyun, Kim, Jin-Soo, Kim, Hyeong-Soo, Fedynyshyn, Theodore H.
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Volume:
5039
Year:
2003
Language:
english
DOI:
10.1117/12.485161
File:
PDF, 1.71 MB
english, 2003
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