SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Low-temperature InOx thin films for O3 and NO2 gas sensing
Kiriakidis, George, Ouacha, Hassan, Katsarakis, N., Galatsis, Kosmas, Wlodarski, Wojtek, Chiao, Jung-Chih, Varadan, Vijay K., Can, CarlesVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.501464
File:
PDF, 494 KB
english, 2003