SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Structures and Integrated Systems - Shape optimization of microcantilevers for mass variation detection and AFM applications
Garcia, Ephrahim, Flatau, Alison B., Lobontiu, Nicolae, Nam, Yoonsu, Ilic, Rob, Reissman, TimothyVolume:
5390
Year:
2004
Language:
english
DOI:
10.1117/12.540043
File:
PDF, 122 KB
english, 2004