SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Application of atomic-force microscopy to phase-shift masks
Ghosh, Amalkumar P., Dove, Derek B., Wickramasinghe, H. Kumar, Stowell, R. M., Roessler, Ken, Postek, Jr., Michael T.Volume:
1673
Year:
1992
Language:
english
DOI:
10.1117/12.59839
File:
PDF, 473 KB
english, 1992