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SPIE Proceedings [SPIE Defense and Security - Orlando, Florida, USA (Monday 28 March 2005)] Infrared Technology and Applications XXXI - Dry etching, surface passivation and capping processes for antimonide based photodetectors
Dutta, Partha, Andresen, Bjorn F., Fulop, Gabor F., Langer, Jeffery, Bhagwat, Vinay, Juneja, JasbirVolume:
5783
Year:
2005
Language:
english
DOI:
10.1117/12.605330
File:
PDF, 235 KB
english, 2005