SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Gas microsensing system with a FGMOS on a MEM structure
Gonzalez-Vidal, Jose Luis, Reyes-Barranca, Alfredo, de la L. Olvera, M., Maldonado, Arturo, Calleja-Arriaga, Wilfrido, Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, FernandoVolume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.607946
File:
PDF, 154 KB
english, 2005