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SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Recent Developments in Traceable Dimensional Measurements III - Size effects on stylus tip reconstruction for micro and nano roughness measurement
Chen, Chao-Chang A., Decker, Jennifer E., Peng, Gwo-Sheng, Chen, Jr-Rung, Liou, Huay-Chung, Chen, Yen-LiangVolume:
5879
Year:
2005
Language:
english
DOI:
10.1117/12.616831
File:
PDF, 1.06 MB
english, 2005