SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Design for Manufacturability through Design-Process Integration - OPC and design verification for DFM using die-to-database inspection
Kim, JungChan, Wong, Alfred K. K., Singh, Vivek K., Yang, HyunJo, Song, JooKyoung, Yim, DongGgyu, Kim, JinWoong, Hasebe, Toshiaki, Yamamoto, MasahiroVolume:
6521
Year:
2007
Language:
english
DOI:
10.1117/12.711348
File:
PDF, 856 KB
english, 2007