![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE The 15th International Symposium on: Smart Structures and Materials & Nondestructive Evaluation and Health Monitoring - San Diego, California (Sunday 9 March 2008)] Nanosensors and Microsensors for Bio-Systems 2008 - Pre and post machining and release residual stresses in microelectromechanical systems (MEMS)
Vechery, Mary, Varadan, Vijay K., Dick, Andrew, Balachandran, B., Dubey, MadanVolume:
6931
Year:
2008
Language:
english
DOI:
10.1117/12.776262
File:
PDF, 350 KB
english, 2008