SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MOEMS and Miniaturized Systems VIII - Feedback stabilized deformable membrane mirrors for focus control
Lukes, Sarah J., Dickensheets, David L., Schenk, Harald, Himmer, Phillip A., Moog, Eric J., Piyawattanametha, Wibool, Shaw, Steven R., Dickensheets, David L.Volume:
7208
Year:
2009
Language:
english
DOI:
10.1117/12.812338
File:
PDF, 501 KB
english, 2009