SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Advances in Resist Materials and Processing Technology XXIX - Tunable resin reactivity of spin-on dielectric by controlling synthesis process

Han, Kwen Woo, Song, Hyun-Ji, Kim, Mi-Young, Park, Eun Su, Yoon, Hui Chan, Kim, Go Eun, Lim, Sang Hak, Kim, Sang Kyun, Somervell, Mark H., Wallow, Thomas I.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
8325
Year:
2012
Language:
english
DOI:
10.1117/12.916252
File:
PDF, 1.81 MB
english, 2012
Conversion to is in progress
Conversion to is failed