Analysis and Reduction of Stacking Faults in Fast Epitaxial...

Analysis and Reduction of Stacking Faults in Fast Epitaxial Growth

Uehigashi, Hideyuki, Fukada, Keisuke, Ito, Masahiko, Kamata, Isaho, Fujibayashi, Hiroaki, Naitou, Masami, Hara, Kazukuni, Osawa, Hitoshi, Kozawa, Takahiro, Tsuchida, Hidekazu
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Volume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.858.173
Date:
May, 2016
File:
PDF, 769 KB
english, 2016
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