Composition of thin Ta 2 O...

Japanese Journal of Applied Physics 2016 / 06 Vol. 55; Iss. 6S1

Composition of thin Ta 2 O 5 films deposited by different methods and the effect of humidity on their resistive switching behavior

Mannequin, Cedric, Tsuruoka, Tohru, Hasegawa, Tsuyoshi, Aono, Masakazu
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.06GG08
Date:
June, 2016
File:
PDF, 1.10 MB
english, 2016
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