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SPIE Proceedings [SPIE Semiconductors '92 - Somerset, NJ (Sunday 22 March 1992)] Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication - GaInP/GaAs multiwafer production in a commercial-available AIX 2000 reactor
Juergensen, Holger, Malik, Roger J., Palmstrom, Chris J., Bedair, Salah M., Craighead, Harold G., Kubena, Randall L.Volume:
1676
Year:
1992
Language:
english
DOI:
10.1117/12.137641
File:
PDF, 447 KB
english, 1992