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SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Interferometry VI: Techniques and Analysis - In-position optical surface measurement for x-ray projection lithography optics: theory and simulation
Seya, Eiichi, Hidaka, Minoru, Ito, Masaaki, Katagiri, Souichi, Takeda, Eiji, Kwon, Osuk Y., Brown, Gordon M., Kujawinska, MalgorzataVolume:
2003
Year:
1993
Language:
english
DOI:
10.1117/12.165471
File:
PDF, 488 KB
english, 1993