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SPIE Proceedings [SPIE IS&T/SPIE 1994 International Symposium on Electronic Imaging: Science and Technology - San Jose, CA (Sunday 6 February 1994)] Machine Vision Applications in Industrial Inspection II - Defect inspection of periodic patterns with low-order distortions
Khalaj, Babak H., Aghajan, Hamid K., Paulraj, Arogyaswami, Kailath, Thomas, Dawson, Benjamin M., Wilson, Stephen S., Wu, Frederick Y.Volume:
2183
Year:
1994
Language:
english
DOI:
10.1117/12.171210
File:
PDF, 287 KB
english, 1994