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SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Improvement of the ArF laser for photolithography
Novoselov, Alexander N., Konstantinov, Boris A., Nikiforov, Victor G., Trinchuk, Boris F., Brunner, Timothy A.Volume:
2440
Year:
1995
Language:
english
DOI:
10.1117/12.209248
File:
PDF, 267 KB
english, 1995