SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Low-doped etch stopping for micromechanical device production

Murfett, David B., Haskard, Malcolm R., Marriage, Alan J., Markus, Karen W.
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Volume:
2639
Year:
1995
Language:
english
DOI:
10.1117/12.221292
File:
PDF, 798 KB
english, 1995
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