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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Sunday 3 April 2016)] Optical Micro- and Nanometrology VI - Influences of edges and steep slopes in 3D interference and confocal microscopy
Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang, Xie, Weichang, Hagemeier, Sebastian, Woidt, Carsten, Hillmer, Harmut, Lehmann, PeterVolume:
9890
Year:
2016
Language:
english
DOI:
10.1117/12.2228307
File:
PDF, 1.26 MB
english, 2016