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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III - Modeling of defect propagation/growth for yield impact prediction in VLSI manufacturing
Li, Xiaolei, Strojwas, Andrzej J., Swecker, Aaron L., Reddy, Mahesh, Milor, Linda, Lin, YungTao, Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-DieterVolume:
3216
Year:
1997
Language:
english
DOI:
10.1117/12.284699
File:
PDF, 767 KB
english, 1997