![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Electromagnetically driven silicon microvalve for large-flow pneumatic controls
Ikehara, Tsuyoshi, Yamagishi, Hideaki, Ikeda, Kyoichi, Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293541
File:
PDF, 425 KB
english, 1997