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SPIE Proceedings [SPIE 5th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 1 March 1998)] Smart Structures and Materials 1998: Smart Electronics and MEMS - Development of a low-cost x-ray mask for high-aspect-ratio MEM smart structures
Ajmera, Pratul K., Stadler, Stefan, Abdollahi, Neda, Varadan, Vijay K., McWhorter, Paul J., Singer, Richard A., Vellekoop, Michael J.Volume:
3328
Year:
1998
Language:
english
DOI:
10.1117/12.320168
File:
PDF, 961 KB
english, 1998