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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - PMMA development studies using various synchrotron sources and exposure conditions
Tan, Ming X., Bankert, Michelle A., Griffiths, Stewart K., Ting, Aili, Boehme, Dale R., Wilson, Shondelle, Balser, Lianna M., Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324068
File:
PDF, 447 KB
english, 1998