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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
Hantschel, Thomas, De Wolf, Peter, Trenkler, Thomas, Stephenson, Robert, Vandervorst, Wilfried, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324089
File:
PDF, 5.61 MB
english, 1998