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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - Reliability of microsystems based on a failure mechanism approach
Cruzel, S., Esteve, Daniel, Dilhan, Monique, Fourniols, Jean-Yves, Pressecq, Francis, Puig, O., Simonne, Jean-Jacques, Lawton, Russell A., Miller, William M., Lin, Gisela, Ramesham, RajeshuniVolume:
3880
Year:
1999
Language:
english
DOI:
10.1117/12.359364
File:
PDF, 1.24 MB
english, 1999