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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Optical and mechanical design of an InP-based tunable detector for gas-sensing applications
Bondavalli, Paolo, Benyattou, Taha, Garrigues, Michel, Leclercq, Jean Louis, Regreny, Philippe, Sun, K., Viktorovitch, Pierre, Cortial, Sebastein, Hugon, Xavier, Pautet, Christophe, Motamedi, M. EdwarVolume:
3878
Year:
1999
Language:
english
DOI:
10.1117/12.361259
File:
PDF, 586 KB
english, 1999