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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Pixel-by-pixel aberration correction for scanned-beam micro-optical instruments
Dickensheets, David L., Ashcraft, Paul V., Himmer, Phillip A., Motamedi, M. Edward, Goering, RolfVolume:
3878
Year:
1999
Language:
english
DOI:
10.1117/12.361286
File:
PDF, 1.37 MB
english, 1999