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SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Micromachining and Microfabrication - Novel self-oscillating anemometer with capacitance-based sensing
Kong, Yen-Peng, Tay, Francis E., Xu, Yuan, Chau, Kevin H., Parameswaran, M., Tay, Francis E.Volume:
4230
Year:
2000
Language:
english
DOI:
10.1117/12.404889
File:
PDF, 224 KB
english, 2000