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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Design, Characterization, and Packaging for MEMS and Microelectronics II - Design of an acoustic wave actuator using Lorentz force
Liu, Ping-Ting, Ho, Yi-Ping, Shen, Shih-Hsorng, Tang, Shih-Tsang, Young, Shuenn-Tsong, Fang, Weileun, Franzon, Paul D., Malshe, Ajay P., Tay, Francis E.Volume:
4593
Year:
2001
Language:
english
DOI:
10.1117/12.448841
File:
PDF, 151 KB
english, 2001