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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Polarization Analysis and Measurement IV - Static spectroscopic ellipsometer based on optical frequency-domain interferometry
Oka, Kazuhiko, Kato, Takayuki, Goldstein, Dennis H., Chenault, David B., Egan, Walter G., Duggin, Michael J.Volume:
4481
Year:
2002
Language:
english
DOI:
10.1117/12.452883
File:
PDF, 162 KB
english, 2002