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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Interferometry XI: Applications - Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler
de Groot, Peter J., Colonna de Lega, Xavier, Grigg, David A., Osten, WolfgangVolume:
4778
Year:
2002
Language:
english
DOI:
10.1117/12.473535
File:
PDF, 175 KB
english, 2002