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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Optical Measurement Systems for Industrial Inspection III - Simple polarization phase shifting for scatterplate interferometry
Patorski, Krzysztof, Salbut, Leszek A., Osten, Wolfgang, Kujawinska, Malgorzata, Creath, KatherineVolume:
5144
Year:
2003
Language:
english
DOI:
10.1117/12.500009
File:
PDF, 285 KB
english, 2003