SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Optical Measurement Systems for Industrial Inspection III - Machine-tool-embedded white light interferometrical sensor for diameter measurements
Franz, Stefan, Windecker, Robert, Tiziani, Hans J., Osten, Wolfgang, Kujawinska, Malgorzata, Creath, KatherineVolume:
5144
Year:
2003
Language:
english
DOI:
10.1117/12.501072
File:
PDF, 521 KB
english, 2003