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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma
Efremov, Alexander, Svettsov, Vladimir, Kim, Chang-Il, Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.557250
File:
PDF, 325 KB
english, 2012