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SPIE Proceedings [SPIE Optics East - Philadelphia, PA (Monday 25 October 2004)] Nanosensing: Materials and Devices - Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes
Quevy, Emmanuel P., King, Tsu-Jae, Howe, Roger T., Islam, M. Saif, Dutta, Achyut K.Volume:
5593
Year:
2004
Language:
english
DOI:
10.1117/12.573034
File:
PDF, 400 KB
english, 2004