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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Multilayer coatings for the EUVL process development tool
Louis, E., Mackay, R. Scott, Zoethout, E., van de Kruijs, R. W. E., Nedelcu, I., Yakshin, A. E., van der Westen, S. A., Tsarfati, T., Bijkerk, F., Enkisch, H., Muellender, S.Volume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.619856
File:
PDF, 138 KB
english, 2005