SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - System-level modeling of segmented deformable micromirror using multi-port-element network method
He, Yang, Jiang, Chengyu, Yuan, Weizheng, Huo, Pengfei, Ma, Binghe, Esashi, Masayoshi, Zhou, ZhaoyingVolume:
6032
Year:
2006
Language:
english
DOI:
10.1117/12.667867
File:
PDF, 422 KB
english, 2006