SPIE Proceedings [SPIE Defense and Security Symposium - Orlando, Florida, USA (Monday 9 April 2007)] Infrared Technology and Applications XXXIII - Uniformity studies of inductively coupled plasma etching in fabrication of HgCdTe detector arrays
Bommena, R., Andresen, Bjørn F., Fulop, Gabor F., Velicu, S., Boieriu, P., Norton, Paul R., Lee, T. S., Grein, C. H., Tedjojuwono, K. K.Volume:
6542
Year:
2007
Language:
english
DOI:
10.1117/12.719350
File:
PDF, 401 KB
english, 2007