SPIE Proceedings [SPIE International Congress on Optics and...

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SPIE Proceedings [SPIE International Congress on Optics and Optoelectronics - Prague, Czech Republic (Monday 16 April 2007)] Damage to VUV, EUV, and X-ray Optics - Compact EUV source and Schwarzschild objective for modification and ablation of various materials

Barkusky, Frank, Bayer, Armin, Peth, Christian, Töttger, Holger, Mann, Klaus, Juha, Libor, Sobierajski, Ryszard H., Wabnitz, Hubertus
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Volume:
6586
Year:
2007
Language:
english
DOI:
10.1117/12.723010
File:
PDF, 1.37 MB
english, 2007
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