SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - Synthesis and properties of new anionic photoacid generators bound polymer resists for e-beam and EUV lithography

Henderson, Clifford L., Wang, Mingxing, Lee, Cheng-Tsung, Henderson, Clifford L., Yueh, Wang, Roberts, Jeanette M., Gonsalves, Kenneth E.
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Volume:
6923
Year:
2008
Language:
english
DOI:
10.1117/12.769004
File:
PDF, 549 KB
english, 2008
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