SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Reflection, Scattering, and Diffraction from Surfaces - Determining thickness of films on a curved substrate by use of ellipsometric measurement
Gu, Zu-Han, Han, Chien-Yuan, Lee, Zhen-You, Hanssen, Leonard M., Chao, Yu-FayeVolume:
7065
Year:
2008
Language:
english
DOI:
10.1117/12.794178
File:
PDF, 605 KB
english, 2008